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Diffractive optical elements with continuous relief fabricated by focused ion beam for monomode fiber coupling

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Abstract

The design, microfabrication and testing of diffractive optical elements (DOE’s) with continuous relief used for fiber coupling are discussed in detail. DOE’s with diameters as small as 50 mm are fabricated by means of focused ion beam (FIB) technology. A focused Ga+ ion beam is used to mill a continuous relief microstructure at a 50 kV acceleration voltage. The optical performance of DOE’s made in this way was compared with that of DOE’s fabricated by other methods. The focusing performance of DOE’s fabricated with three and six annulus by FIB milling was investigated. Testing of the system which has a coupling efficiency of -1.25 dB (75%) shows that the design meets the application’s requirement for fiber coupling, and that DOE’s manufactured by our FIB technology are practicable. Compared with a conventional fiber coupling system that uses a plano - convex lens, our system has the advantages of simplicity, short focal length, low cost for the lens and high coupling efficiency.

©2000 Optical Society of America

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Figures (5)

Fig.1 .
Fig.1 . chematic diagram of micro- diffractive/refactive lens coupling with monomode fiber
Fig.2 .
Fig.2 . esigned DOEs with continuous relief profile and three annulius
Fig.3 .
Fig.3 . illed DOE’s with continuous relief with three annuli (a) SEM image, (b) profile measured with the WYKO interferometer
Fig.4 .
Fig.4 . illed DOE’s with continuous relief and six annuli (a) SEM image, (b) profile measured with the WYKO interferometer
Fig.5 .
Fig.5 . esults of beam profile measurements. (a) Focused beam intensity distribution peak of DOE’s with three annuli and 10×10 illuminated lenslet arrays; (b) focused beam intensity distribution peak of the DOEs with six annuliar and 10×10 illuminated lenslet arrays; (c) beam profile for DOE’s with three annuli; (d) beam

Tables (2)

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Table 1. Optical Performance Data For Several Does Fabrication Methods as Reported in the Literature and for our FIB’s

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Table2. Comparison of Coupling Performance Between our DOE’s System and Conventional Plano - Convex Lens Systems

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

r m 2 = 2 m λ f + ( m λ ) 2
S ( r ) = m λ n 1 + c r 2 1 + 1 ( K + 1 ) c 2 r 2
c = 1 f [ 1 n ] + m λ
K = n 2
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