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Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy

J. Neauport, P. Cormont, P. Legros, C. Ambard, and J. Destribats

Open Access Open Access

Abstract

We report an experimental investigation of fluorescence confocal microscopy as a tool to measure subsurface damage on grinded fused silica optics. Confocal fluorescence microscopy was performed with an excitation at the wavelength of 405 nm on fixed abrasive diamond grinded fused silica samples. We detail the measured fluorescence spectrums and compare them to those of oil based coolants and grinding slurries. We evidence that oil based coolant used in diamond grinding induces a fluorescence that marks the subsurface damages and eases its observation. Such residual traces might also be involved in the laser damage process.

©2009 Optical Society of America

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Supplementary Material (1)

Media 1: AVI (2861 KB)     

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Figures (10)
Fig. 1.
Fig. 1. Sample preparation method of sample D1

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Fig. 3.
Fig. 3. Confocal microscopy principle: epifluorescence mode (left) and reflection mode (right)

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Fig. 4.
Fig. 4. Sample D2 - Confocal microscopy image of the surface in the MRF dimple on an area of 1.5×1.5 mm2, approximately 50 μm removed by MRF between border of the dimple and top of the figure. Same area measured in reflection at 458 nm (a), fluorescence in the 435–661nm spectral band for an excitation wavelength of 405 nm (b) and superposition of the two images (c) - 63 ×x objective

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Fig. 5.
Fig. 5. Sample D2, area of 1.5 × 1.5 mm2 - Standard microscopy image (in light grey) after light HF etching to reveal cracks superposed to Fig. 4(c) i.e. image in fluorescence mode before etching (red) and reflection mode (green) - 63 × objective

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Fig. 6.
Fig. 6. Sample D1 - Confocal microscopy in fluorescence mode in the 435 nm - 661 nm band (405 nm excitation). Diamond grinded surface is at the bottom, measurement carried out from the back side i.e. top of the figure. (Media 1). 63 × objective

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Fig. 7.
Fig. 7. Sample D1 - Fluorescence spectrum for different excitation wavelengths measured on SSD. Spectrums are normalized to 1 to be compared.

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Fig. 8.
Fig. 8. Sample D3 - Confocal microscopy image of the surface in the MRF dimple on an area of 90×90 μm2. Superposition of image in reflection mode at 458 nm (in green), and image in fluorescence mode in the 435–661nm spectral band for an excitation wavelength of 405 nm(in red)

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Fig. 9.
Fig. 9. Sample D3 - Confocal microscopy image in fluorescence mode (405 nm excitation wavelength) in the MRF dimple on an area of 20×20 μm2. Surface rendering is done to show structure of the SSD. Dimple surface is on the back of the image.

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Fig. 10.
Fig. 10. Sample D4 - Confocal microscopy image of the surface in the MRF dimple on an area of 373 × 373 μm2. Superposition of image in reflection mode at 458 nm (in green), and image in fluorescence mode in the 435-661nm spectral band for an excitation wavelength of 405 nm (in red) - 40× objective.

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Fig. 11.
Fig. 11. Fluorescence spectrum for an excitation wavelength of 405 nm of the oil based coolant and the SSD of sample D1.

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Tables (2)

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Table 1. Sample preparation methods

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Table 2: Sample preparation to ease confocal microscopy observation

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