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Fabrication of two-layer integrated phase mask for single-beam and single-exposure fabrication of three-dimensional photonic crystal

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Abstract

In this paper, we report a new design and fabrication of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates. The phase mask consists of two layers of orthogonally oriented gratings produced in a polymer. The vertical spatial separation between two layers produces a phase shift among diffractive laser beams, which enables the holographic fabrication of inter-connected three-dimensional photonic structures. A three-dimensional photonic crystal template was fabricated using the two-layer phase mask and was consistent with simulations based on the five beam interference. The reported method simplifies the fabrication of photonic crystals and is amendable for massive production and chip-scale integration of three-dimensional photonic structures.

©2008 Optical Society of America

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Figures (4)

Fig. 1.
Fig. 1. Scheme of two beam interference for the formation of optical phase mask consisting of two orthogonally oriented gratings in a photoresist.
Fig. 2.
Fig. 2. Scanning electron microscope of the fabricated phase mask showing two layers of grating structure (a), and the enlarged view (b).
Fig. 3.
Fig. 3. (a). Scheme of phase mask and diffracted beams by the top grating; (b) Photo of fabricated phase mask and diffracted beams by the phase mask.
Fig. 4.
Fig. 4. (a). Scheme of setup for single beam exposure; (b) SEM of photonic crystal template fabricated using the phase mask through single beam and single exposure method; (c) An enlarged view of SEM. The inset is the simulation of five-beam interference pattern; (d-e) 3D pattern of the five-beam interference with δ12=0.35 π (d) and δ12=0 π (e); (f) Fabricated structure in SU-8 with δ12=0 π and simulated intensity pattern as an insert; (g) 3D pattern of the five-beam interference with δ12=0.2 π.

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

E 0 , 0 ( r , t ) = E 0 , 0 cos ( ( k 0 , 0 r ω t + δ 1 ) ,
E 1 , 0 ( r , t ) = E 1 , 0 cos ( ( k 1 , 0 r ω t + δ 1 ) ,
E 1 , 0 ( r , t ) = E 1 , 0 cos ( ( k 1 , 0 r ω t + δ 1 ) ,
E 0 , 1 ( r , t ) = E 0 , 1 cos ( ( k 0 , 1 r ω t + δ 2 ) ,
E 0 , 1 ( r , t ) = E 0 , 1 cos ( ( k 0 , 1 r ω t + δ 2 )
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