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Compact electro-optic modulator on silicon-on-insulator substrates using cavities with ultra-small modal volumes

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Abstract

We experimentally demonstrate a micron-size electro-optic modulator using a high-index-contrast silicon Fabry-Pérot resonator cavity. This compact device consists of a 1-D cavity formed within a single mode silicon channel waveguide and an embedded p-i-n junction on a silicon-on-insulator platform. The entire device is 6.0 microns in length. We demonstrate modulation depths as large as 5.87 dB at speeds of 250 Mbps limited only by fabrication imperfections, with optimized theoretical speeds of several Gbps.

©2007 Optical Society of America

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Figures (7)

Fig. 1.
Fig. 1. (a) Schematic of the F-P modulator. The effective refractive index in the cavity is changed by carrier injection and extraction when a potential is applied across the p-i-n. (b) Optical image of a fabricated device with a cavity length of 2.51 microns on a SOI substrate, showing the metal contacts and vias on either side. The contacts are much larger than the actual doped regions. The entire device is shorter than 6 microns in length.
Fig. 2.
Fig. 2. Measured transmission spectrum of the micro-cavity for an applied voltage of 0.8 V (below threshold) and 5.6 V (above threshold).
Fig. 3.
Fig. 3. Transmission as a function of applied DC bias for a wavelength of 1568.54 nm.
Fig. 4.
Fig. 4. Optical modulation due to an applied electrical signal at 250 Mbps.
Fig. 5.
Fig. 5. Optical extinction ratio as a function of the speed of the applied AC signal.
Fig. 6.
Fig. 6. (a) Simulated 1 GBPS operation for the present device with (Q=780, voltage swing of 2.0 V and DC bias of 0.3 V. (b) Simulated rise and fall times for electrically ideal p-i-n structures with different Q’s.
Fig. 7.
Fig. 7. Absolute shift in the peak resonance as a function of the DC power consumed in the device for a ring resonator (circumference = 31.4 μm) and a F-P cavity (length of 2.51 μm).

Equations (4)

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Δ n cavity = [ 8.8 × 10 22 ( Δ N e ) + 8.5 × 10 18 ( Δ N h ) 0.8 ]
Δ n cavity P AL
MD Δ λ resonance δ λ FWHM Q P AL
FOM = MD × Bandwidth Power 1 V eff
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