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Dynamic closed-loop system for focus tracking using a spatial light modulator and a deformable membrane mirror

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Abstract

A dynamic closed-loop method for focus tracking using a spatial light modulator and a deformable membrane mirror within a confocal microscope is described. We report that it is possible to track defocus over a distance of up to 80 μm with an RMS precision of 57 nm. For demonstration purposes we concentrate on defocus, although in principle the method applies to any wavefront shape or aberration that can be successfully reproduced by the deformable membrane mirror and spatial light modulator, for example, spherical aberration.

©2006 Optical Society of America

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Figures (5)

Fig. 1.
Fig. 1. A schematic of the experimental setup. L1 – L6 make up three 4f lens systems and Ph1 is a pinhole that selects the first diffraction order from the SLM.
Fig. 2.
Fig. 2. A schematic of the closed-loop control system. The majority of the optical components have been omitted for clarity but can be seen in Fig. 1.
Fig. 3.
Fig. 3. The axial PSF, recorded by translating the microscope objective, for different quantities of defocus applied using a) the DMM and b) the SLM.
Fig. 4.
Fig. 4. A graph of PSF with the corresponding first and second derivatives from the lock-in amplifiers.
Fig. 5.
Fig. 5. The response of the lock-in amplifier when the feedback loop to the SLM is closed.
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