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99% efficiency measured in the -1st order of a resonant grating

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Abstract

A resonant diffraction grating comprising a mirror, a dielectric layer and a high index corrugation at the layer-air interface is shown to exhibit off-Littrow the record diffraction efficiency of 99% in the -1st reflected order at 1064 nm wavelength thanks to the excitation of a leaky mode of the layer. Such high figure is obtained by a grating 5 to 10 times shallower than in current attempts to realize high efficiency all-dielectric gratings.

©2005 Optical Society of America

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Figures (4)

Fig. 1.
Fig. 1. Fresnel reflection mechanism on a mirror based corrugated dielectric film : direct reflection, field trapping, leaky mode propagation and re-radiation. The corrugation balances the direct reflected and the re-radiated field modulus ensuring 100% −1st order efficiency. The inset represents the fabricated multilayer grating structure.
Fig. 2.
Fig. 2. AFM scan of the 560 nm period grating etched into the last Ta2O5 layer of 70 nm thickness.
Fig. 3.
Fig. 3. Comparison of the experimental and the theoretical diffraction efficiencies of the −1st order for the TE polarization. Calculations are performed taking into account the groove depth experimental value of 52 nm and a line/space ratio of 0.85. Both experiments and calculations are performed at a wavelength of 1064 nm with a variable incidence angle. The diffraction efficiency is defined as the ratio between the diffracted power and the incident power.
Fig. 4.
Fig. 4. Comparison of the experimental and the theoretical diffraction efficiencies in the 0th order in TM polarization. Both experiments and calculations are performed at a wavelength of 1064 nm with a variable incidence angle. In this case, TM leaky mode excitation condition is not fulfilled and −1st order efficiency is practically zero.

Equations (2)

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k 0 n f h cos θ f + ϕ m + ϕ c 2 = m π
k 0 n f h cos θ f = π 2
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