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Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique

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Abstract

A simple and efficient optical interference method for fabricating high quality two- and three-dimensional (2D and 3D) periodic structures is demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures are created depending on the number of exposure and the rotation angle of the sample for each exposure. Square and hexagonal 2D structures are fabricated by a multi-exposure of two-beam interference pattern with a rotation angle of 90° and 60° between two different exposures, respectively. Three-exposure, in particular, results in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. The experimental results obtained with SU-8 photoresist are well in agreement with the theoretical predictions. Multi-exposure of two-beam interference technique should be very useful for fabrication of photonic crystals.

©2005 Optical Society of America

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Figures (4)

Fig. 1.
Fig. 1. Experimental setup of multi-exposure two-beam interference technique used for fabrication of 2D and 3D periodic structures.
Fig. 2.
Fig. 2. Calculated iso-intensity distribution (Iiso =60%Imax ) of three-exposure of two-beam interference pattern with λ = 514 nm, θ = 15°. Three exposures are realized at angles: (a): (α, β) = (90°, 0°), (0°, 45°), and (180°, 45°); (b): (α, β) = (90°, 0°), (0°, 30°), and (180°, 30°); and (c): (α, β) = (60°, 0°), (0°, 30°), and (180°, 30°).
Fig. 3.
Fig. 3. SEM images of 2D periodic structures, Λ = 1μm (θ = 9.35°, λ= 325nm): (a) square structure obtained by two-exposure at α= 0° and 90°; (b) hexagonal structure obtained by two-exposure at α= 0° and 60°; (c) hexagonal structure obtained by three-exposure at α= -60°, 0° and 60°.
Fig. 4.
Fig. 4. SEM images of 3D periodic structures, Λ = 2μm (θ= 7.38°, λ= 514nm), fabricated by three exposures: (a) (α, β) = (90°, 0°), (0°, 45°), and (180°, 45°); (b) (α, β) = (60°, 0°), (0°, 30°), and (180°, 30°); (c) side view of (b). Insets are theoretical calculation results for comparison.

Equations (4)

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E 1 α β , 2 α β = E 10,20 cos [ k z cos ( θ β ) ± k sin ( θ β ) ( x cos α + y sin α ) ω t ] ,
I α β = E 1 α β + E 2 α β 2 = 2 E 0 2 cos 2 [ k sin θ ( z sin β + ( x cos α + y sin α ) cos β ) ] ,
Λ = λ 2 sin θ ,
I multi-exposure = i I α i β i ,
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