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Microchannel fabrication in PMMA based on localized heating by nanojoule high repetition rate femtosecond pulses

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Abstract

Microchannels are fabricated in a poly(methyl methacrylate) substrate by high repetition rate, nanojoule femtosecond laser pulses. The mechanism for channel fabrication is based on the localized heating of the substrate due to the high repetition rate of the laser, resulting in smooth walled cylindrical channels. Microchannels with diameters of 8 – 20 μm can be fabricated at 800 μm/s using 80 fs pulses at a repetition rate of 80 MHz and energy of 0.9 nJ/pulse.

©2005 Optical Society of America

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Figures (5)

Fig. 1.
Fig. 1. Schematic diagram of (a) the experimental setup for fabrication of microchannels and (b) the fabrication geometry in the sample.
Fig. 2.
Fig. 2. Transmission images of a microchannel. (a) before and (b) after annealing at 200°C for 30 seconds. (c) and (d) are magnified sections of the channel before and after annealing. (e) illustrates that hollow channels are formed as water enters the channel via capillary action. The scale bars are 10 μm.
Fig. 3.
Fig. 3. Measured microchannel characteristics as a function of the fabrication speed. (a) width, (b) depth and (c) ratio of width to depth. (d) transmission image of microchannels. The scale bar is 50 μm.
Fig. 4.
Fig. 4. Measured microchannel characteristics as a function of the number of fabrication repeats, (a) width, (b) depth, (c) ratio of width to depth. (d) transmission image of microchannel cross-sections. The scale bar is 50 μm.
Fig. 5.
Fig. 5. Measured microchannel characteristics as a function of the delay between repeats.
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