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Microring-resonator-based add-drop filters in SiN: fabrication and analysis

Tymon Barwicz, Miloš A. Popovic, Peter T. Rakich, Michael R. Watts, Hermann A. Haus, Erich P. Ippen, and Henry I. Smith

Open Access Open Access

Abstract

Third-order add-drop filters based on series-coupled microring resonators were fabricated in silicon-rich silicon nitride with accurate dimensional control and negligible sidewall roughness. For the first time, a low 3 dB drop loss is demonstrated with a wide 24 nm free-spectral-range in a high-order microring filter without using the Vernier effect. The spectral response is matched by rigorous numerical simulation, and non-idealities in the drop- and through-port responses are shown to be of design origin and to be correctable.

©2004 Optical Society of America

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Figures (3)
Fig. 1.
Fig. 1. Cross-section of a waveguide. See Table 1 for waveguide parameters.

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Fig. 2.
Fig. 2. Third-order add-drop filter based on series-coupled microring resonators. The rings’ outer radius is 7.3 µm. The ring-to-bus gap is 60 nm and the ring-to-ring gap is 268 nm. (a) Scanning-electron micrograph. (b) Schematic of the chip layout used in the experiment. To ensure a reliable drop-loss measurement, the drop and the through waveguides traverse equivalent paths.

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Fig. 3.
Fig. 3. Measured and simulated response of the third-order microring filter. The spectral asymmetry is due to frequency mismatch of resonators and can be compensated. Input-to-drop loss is dominated by scattering at the 60-nm-wide ring-bus coupler gaps. The narrow peak on the right of the drop spectrum is a measurement artifact. The inset shows several resonances and the free-spectral-range.

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Tables (1)

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Table 1. Waveguide Parameters

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