Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

On-chip Si-based Bragg cladding waveguide with high index contrast bilayers

Open Access Open Access

Abstract

A new silicon based waveguide with full CMOS compatibility is developed to fabricate an on-chip Bragg cladding waveguide that has an oxide core surrounded by a high index contrast cladding layers. The cladding consists of several dielectric bilayers, where each bilayer consists of a high index-contrast pair of layers of Si and Si3N4. This new waveguide guides light based on omnidirectional reflection, reflecting light at any angle or polarization back into the core. Its fabrication is fully compatible with current microelectronics processes. In principle, a core of any low-index material can be realized with our novel structure, including air. Potential applications include tight turning radii, high power transmission, and dispersion compensation.

©2004 Optical Society of America

Full Article  |  PDF Article
More Like This
An all-silicon, single-mode Bragg cladding rib waveguide

Ee Jin Teo, Andrew A. Bettiol, Boqian Xiong, Mark B. H. Breese, and Prashant T. Shuvan
Opt. Express 18(9) 8816-8823 (2010)

Low-loss high-index-contrast planar waveguides with graded-index cladding layers

Juejun Hu, Ning-Ning Feng, Nathan Carlie, Laeticia Petit, Jianfei Wang, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling
Opt. Express 15(22) 14566-14572 (2007)

Integrated ARROW waveguides with hollow cores

D. Yin, H. Schmidt, J.P. Barber, and A.R. Hawkins
Opt. Express 12(12) 2710-2715 (2004)

Cited By

Optica participates in Crossref's Cited-By Linking service. Citing articles from Optica Publishing Group journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1.
Fig. 1. The illustration of the Bragg cladding waveguide, with low index core (SiO2) and Si/Si3N4 as dielectric cladding layers.
Fig. 2.
Fig. 2. (a) The TEM image of the cladding pairs including the bottom Bragg cladding layers (Si/Si3N4) and SiO2 core. (b) The measurement and simulation on absolute reflectivity of 5 pairs Si/Si3N4 layers.
Fig. 3.
Fig. 3. (a) The TEM image of the fabricated Bragg cladded channel waveguide. The smooth interface and good conformal step coverage by LPCVD method are clearly seen. (b) The guided spot from the Bragg cladded channel waveguide with dimension 4μm ×4μm, which demonstrated the guidance in the low index SiO2 materials by PBG guiding mechanism.
Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.