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Low propagation loss of the waveguides in fused quartz by oxygen ion implantation

Xue-Lin Wang, Ke-Ming Wang, Gang Fu, Shi-Ling Li, Ding-Yu Shen, Hong-Ji Ma, and Rui Nie

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Abstract

The planar waveguides have been fabricated in fused quartz by 3.0 MeV oxygen ion implantation at dose of 1×1015ions/cm2. The guiding modes were observed at wavelengths of both 633 nm and 1539 nm before and after annealing at 320°C, 450°C and 500°C in 60 min characterized by the prism-coupling method. The width of the waveguide structure induced by oxygen ion implantation is about 3 microns. After suitable annealing, the minimum propagation loss of the waveguide in fused quartz can be reduced to -0.14 dB/cm.

©2004 Optical Society of America

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Figures (4)
Fig. 1.
Fig. 1. Measured relative intensity of the light (TE polarized) reflected from the prism versus effective refractive index for the fused quartz waveguide formed by 3.0 MeV O+ ion implantation at the dose of 1×1015 ions/cm2 before and after annealing with the wavelengths of both 633 nm and 1539 nm, respectively. A1 and A2 represent the results for as implanted sample measured with wavelength of 633 and 1539nm, respectively. D1 and D2 represent the results after annealing at 500°C in air measured with wavelength of 633nm and 1539nm, respectively.

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Fig. 2.
Fig. 2. Refractive index profiles (at the wavelength of 633nm) of the fused quartz waveguide formed by 3.0 MeV O+ ion implantation under four different treatments: A, as implanted; B, after annealing at 320°C, 60min; C, after annealing at 450°C, 60min; D, after annealing at 500°C, 60min; E, refractive index for virgin of fused quartz (n=1.4572).

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Fig. 3.
Fig. 3. Natural logarithm of the scattered intensity of light vs. propagation distance along the fused quartz waveguides formed by 3.0 MeV O+ ion implantation at the dose of 1×1015 ions/cm2 before and after different annealing treatments in air measured with the wavelengths of 633 nm, respectively. A, as implanted; B, after annealing at 320°C, 60min; C, after annealing at 450°C, 60min; D, after annealing at 500°C, 60min.

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Fig. 4.
Fig. 4. The 633nm light propagating from right to left through the fused quartz waveguide formed by 3.0 MeV O+ ion implantation with prism coupling: A: as implanted and B: after annealing treatment at 500°C in air, respectively.

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Tables (1)

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Table 1. Comparison of measured and calculated by RCM propagation modes of their effective refractive indices obtained from different treatments at the wavelength of 633nm. A, as implanted; B, after annealing at 320°C, 60min; C, after annealing at 450°C, 60min; D, after annealing at 500°C, 60min.

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