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Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator

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Abstract

We describe a computer-controlled low-coherence interference microscope, based on a Linnik interferometer configuration that can rapidly and accurately map the shape of micro-machined surfaces exhibiting steps and discontinuities. The novel feature of the system is a fast, switchable achromatic phase-modulator operating on the geometric phase, using a pair of ferro-electric liquid crystal devices.

©2004 Optical Society of America

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Figures (4)

Fig.1.
Fig.1. GPM with FLC devices. Two FLC devices are sandwiched between two quarter-wave plates.
Fig. 2.
Fig. 2. Schematic of the low coherence interference microscope using an FLC phase modulator.
Fig. 3.
Fig. 3. Visibility of the interference fringes as a function of the position of the sample along the z axis.
Fig. 4.
Fig. 4. Surface profile of an integrated circuit measured with our system. The lateral dimensions of the object are 25 µm×43 µm, height 1 µm.
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