Abstract
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2).
©2004 Optical Society of America
Full Article | PDF ArticleMore Like This
Yuri Sikorski, Corneliu Rablau, Mark Dugan, Ali A. Said, Philippe Bado, and Lars Guenter Beholz
Appl. Opt. 45(28) 7519-7523 (2006)
Y. Bellouard, E. Barthel, A. A. Said, M. Dugan, and P. Bado
Opt. Express 16(24) 19520-19534 (2008)
An Pan, Jinhai Si, Tao Chen, Yuncan Ma, Feng Chen, and Xun Hou
Opt. Express 21(14) 16657-16662 (2013)