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Tunable liquid-filled microlens array integrated with microfluidic network

Nikolas Chronis, Gang L. Liu, Ki-Hun Jeong, and Luke P. Lee

Open Access Open Access

Abstract

An elastomer-based tunable liquid-filled microlens array integrated on top of a microfluidic network is fabricated using soft lithographic techniques. The simultaneous control of the focal length of all the microlenses composing the elastomeric array is accomplished by pneumatically regulating the pressure of the microfluidic network. A focal length tuning range of hundreds of microns to several millimeters is achieved. Such an array can be used potentially in dynamic imaging systems and adaptive optics.

©2003 Optical Society of America

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Figures (13)
Fig. 1.
Fig. 1. Optical micrograph of the microlens array. Upon pressurizing the elastomeric liquid filled chamber, the membrane deforms forming a plano-convex lens array.

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Fig. 2.
Fig. 2. The fabrication process for integrating microfluidics on bottom of the microlens array (the dotted lines represent a microchannel that connects the two chambers but is not on the same plane as the above cross-sectional view).

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Fig. 3.
Fig. 3. Spectral transmission range of PDMS elastomer (the spectrum was obtained from 1 mm thick PDMS sample using an Ocean Optics SD2000 spectrometer).

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Fig. 4.
Fig. 4. Optical interferometric image of a single PDMS microlens at 20 KPa.

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Fig. 5.
Fig. 5. Maximum membrane deflection versus pressure. The maximum deflection is normalized to the initial zero-pressure deflection.

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Fig. 6.
Fig. 6. Cross section view of the PDMS membrane pressurized at 20 KPa (the scale represents vertical displacement in microns). The finite element simulation reveals two radii of curvature.

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Fig. 7.
Fig. 7. Outer and inner radius of curvature versus applied pressure.

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Fig. 8.
Fig. 8. Measured profile of the outer lens surface and curve fitting using sixth order polynomials. Table 1 below summarizes the polynomial coefficients as well as the simulated spherical aberrations.

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Fig. fig08.1
Fig. fig08.1 Table 1. Polynomial Coefficients

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Fig. 9.
Fig. 9. The experimental setup for measuring the focal length of the variable-focus microlens.

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Fig. 10.
Fig. 10. Focal length versus pressure for an oil and UV curable polymer-filled microlens.

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Fig. 11.
Fig. 11. Percentage focal length change versus pressure for an oil-filled and UV curable polymer-filled (Norland 63) microlens.

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Fig. 12.
Fig. 12. Variable focusing of the oil-filled microlens array by changing the pressure. A sharp focused spot is obtained when the focal plane comes in focus.

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