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Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing

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Abstract

A negative tone hybrid sol-gel material was applied to the fabrication of continuous surface relief micro-optical elements by laser direct writing lithography. The hybrid sol-gel glass was synthesized as UV photosensitive material and used for the fabrication of micro-optical elements with continuous surface relief profile. The surface profile was directly controlled by the UV exposure dosage and the exposed areas were crosslinked and converted into sol-gel glass with relief structures. The UV exposure dosage was realized by an acousto-optic modulator (AOM) in the laser direct writing system. Characterization results indicated that the thickness of the sol-gel glass has a linear response to the AOM values ranging from 3.25 to 5.5. The sol-gel thin film was measured to have a refractive index of 1.52 and the maximum thickness of 2 μm. For various designs of diffractive optical elements within the visible wavelength, the sol-gel film enables us to achieve an arbitrary phase change between 0 and 2π with the linear AOM exposure range. As an example, a blazed grating with a period of 45 μm and height of 1.17 μm was fabricated in the sol-gel glass using direct laser writing method.

©2002 Optical Society of America

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Figures (4)

Figure 1.
Figure 1. Schematic of the laser direct writing system.
Figure 2.
Figure 2. ‘.’ Sol-gel film thickness as a function of AOM values. ‘-’ phase difference caused by the sol-gel film thickness as a function of AOM value for a refractive index of n = 1.52, and laser wavelength of λ = 0.6328 μm.
Figure 3.
Figure 3. Photograph of the blazed grating.
Figure 4.
Figure 4. Surface profile of the blazed grating.

Equations (2)

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AOM = 0.08146 · ln ( 1.262510 16 I ) + 2.00119 · ( I 0.5 ) 0.3189
ΔΦ = 2 π ( n 1 ) h λ
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