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Multiple wavelength heterodyne array interferometry

Lenore McMackin, David G. Voelz, and Matthew P. Fetrow

Open Access Open Access

Abstract

Multiple wavelength interferometry is combined with a heterodyne array sensing technique to provide an approach for measuring highly aberrated optical surfaces. Interferometric measurements created with long effective wavelengths are obtained by digitally combining complex exposures collected at different optical wavelengths. The heterodyne array sensing method is straightforward to implement and holds promise for rapid wavefront measurements with high spatial and phase resolution. Measurements of a tilted, flat surface are presented and analyzed.

©1997 Optical Society of America

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Supplementary Material (3)

Media 1: MOV (903 KB)     
Media 2: MOV (1260 KB)     
Media 3: MOV (1612 KB)     

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Figures (4)
Fig. 1.
Fig. 1. Diagram of heterodyne array profilometer.

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Fig. 2.
Fig. 2. Phase maps of a tilted surface for the equivalent wavelengths in Table 1. [Media 1]

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Fig. 3.
Fig. 3. Unwrapped phase profile plots of a tilted surface for the equivalent wavelengths in Table 1. [Media 2]

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Fig. 4.
Fig. 4. Optical path profiles of a tilted surface for the equivalent wavelengths in Table 1. [Media 3]

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Tables (1)

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Table 1. Complex exposure wavelengths and resulting equivalent wavelengths

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Equations (5)

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E a ( r m , λ a ) = A a ( r m , λ a ) exp { j ( ϕ a ( r m , λ a ) + ϕ refa ) } ,
E b ( r m , λ b ) = A b ( r m , λ b ) exp { j ( ϕ b ( r m , λ b ) + ϕ refb ) } .
arg { E a ( r m , λ a ) E b ( r m , λ b ) * } = ϕ a ( r m , λ a ) − ϕ b ( r m , λ b ) + ϕ refa − ϕ refb .
ϕ eq r m λ a = ϕ a ( r m , λ a ) − ϕ b ( r m , λ b ) = 2 πOPD ( r m ) λ eq ,
λ eq = λ a λ b ∣ λ a − λ b ∣ .
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